Physics Nuclear Physics And Radiation Physics

Ultra-fast Laser Synthesis of Nanopore Arrays in Silicon for Bio-molecule Separation and Detection

Authors: Tringe, J W Ileri, N Letant, S E Stroeve, P Shirk, M Zaidi, S Balhorn, R L Siders, C W
 
Abstract: We demonstrate that interference of ultra-fast pulses of laser light can create regular patterns in thin silicon membranes that are compatible with the formation of a uniform array of nanopores. The spacing and size of these pores can be tuned by changing the laser energy, wavelength and number of ultra-short pulses. Short pulses and wavelengths (~550 nm and smaller) are needed to define controllable nanoscale features in silicon. Energy must be localized in time and space to produce the etching, ablation or amorphization effects over the ~100 nm length scales appropriate for definition of single pores. Although in this brief study pattern uniformity was limited by laser beam quality, a complementary demonstration reported here used continuous-wave interferometric laser exposure of photoresist to show the promise of the ultra-fast approach for producing uniform pore arrays. The diameters of these interferometrically-defined features are significantly more uniform than the diameters of pores in state-of-the-art polycarbonate track etch membranes widely used for molecular separations.
Publication Date: 07 Feb 2008
Report numbers: LLNL-TR-401188
DOE Contract number: W-7405-ENG-48
Resource Type: Technical Report
Research Organizations: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Organizations: USDOE
Country of Publication: United States
Language: English
Keywords relating to this report:
ABLATION
CLASSICAL AND QUANTUMM MECHANICS, GENERAL PHYSICS
DETECTION
ETCHING
GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
LASERS
MEMBRANES
POLYCARBONATES
SILICON
SYNTHESIS
WAVELENGTHS

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